Optimization of ZnO Piezoelectric Thin Films and Bottom Electrodes in Thin Film BulkAcoustic Wave Resonator
نویسندگان
چکیده
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
چکیده ندارد.
15 صفحه اولZinc Oxide Piezoelectric Thin Films for Bulk Acoustic Wave Resonators
・ Abstract – Characteristics of Zinc oxide (ZnO) piezoelectric thin films have been investigated for thin film bulk acoustic wave (BAW) resonators with relationship to bottom electrodes. A Metal/ZnO/Metal/SiO2 membrane structure, which has secondary harmonics, was adopted for the BAW resonators. The ZnO thin films, showed clear c-axis orientation, were made by rf sputtering on bottom electrodes...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2000
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.120.547